Photoresist Chemicals 2-Azetidinecarboxylic acid, 3-[3-[[(1,1-dimethylethyl)dimethylsilyl]oxy]propyl]-1-(9-phenyl-9H-fluoren- 9-yl)-, 1,1-dimethylethyl ester, (2S,3S)- Cas:851066-54-1 Molecular Formula:C36H47NO3Si