Photoresist Chemicals 2-Azetidinecarboxylic acid, 2-(bromoacetyl)-3-chloro-1-[[1-(dichlorophosphino)-6-hydroxy-3-phenyl[ 1,3]azaphospholo[1,5-a]pyridin-5-yl]nitroamino]-4-oxo-, ethyl ester Cas:848843-52-7 Molecular Formula:C21H16BrCl3N4O7P2