Photoresist Chemicals 1H-Thieno[2,3-c]pyrazole-5-carboxamide, N-[3-[[(2-amino-5-pyrimidinyl)amino]carbonyl]-4-methylphenyl]-1-methyl- 3-(trifluoromethyl)- Cas:925897-98-9 Molecular Formula:C20H16F3N7O2S