Photoresist Chemicals 1H-Pyrrole-1-carboxylic acid, 2-(7-fluoro-2,3-dihydro-3,3-dimethyl-2-oxo-1H-indol-5-yl)-, 1,1-dimethylethyl ester Cas:872141-36-1 Molecular Formula:C19H21FN2O3