Photoresist Chemicals 1H-Pyrazole-3-carboxamide, N-[4-(4-chloro-2-thienyl)-5-(4-cyclohexyl-1-piperazinyl)-2-thiazolyl]-1-[3-[[ (1,1-dimethylethyl)dimethylsilyl]oxy]propyl]-5-methyl- Cas:570405-10-6 Molecular Formula:C31H47ClN6O2S2Si