Photoresist Chemicals 1H-Indole-1-carboxylic acid, 3-[3,3,4,4,5,5-hexafluoro-2-(2-methylbenzo[b]thien-3-yl)-1-cyclopenten- 1-yl]-2-methyl-, 1,1-dimethylethyl ester Cas:877996-23-1 Molecular Formula:C28H23F6NO2S