Photoresist Chemicals 1H-Indole-1-carboxamide, 4-fluoro-5-[[2-[[(2S)-2-(hydroxymethyl)-1-pyrrolidinyl]carbonyl]thieno[3,2- b]pyridin-7-yl]oxy]-2-methyl-N-2-propynyl- Cas:596794-20-6 Molecular Formula:C26H23FN4O4S