Photoresist Chemicals 1H-Imidazole-1-sulfonamide, 5-[(2S,5S)-5-[(1,3-dihydro-1,3-dioxo-2H-isoindol-2-yl)methyl]tetrahydro- 2-furanyl]-N,N-dimethyl- Cas:571167-78-7 Molecular Formula:C18H20N4O5S