Photoresist Chemicals 1H-Benzimidazole, 2-[[4-[(6-chloro-1,3-benzodioxol-5-yl)methyl]hexahydro-1H-1,4-diazepin -1-yl]methyl]-1-(phenylmethyl)- Cas：564487-29-2 Molecular Formula：C28H29ClN4O2