Photoresist Chemicals 1H-Benzimidazole-1-carboxamide, 5-fluoro-2,3-dihydro-3-(1-methylethyl)-2-oxo-N-[[1-[(tetrahydro-4-hydroxy -2H-pyran-4-yl)methyl]-4-piperidinyl]methyl]- Cas:847605-22-5 Molecular Formula:C23H33FN4O4