Photoresist Chemicals 1H-1,4-Diazepine-2,5-dione, 4-[(3-amino-4-chlorophenyl)sulfonyl]-6-[(5-chloro-2-methoxyphenyl)meth yl]tetrahydro-, monohydrochloride Cas:889853-15-0 Molecular Formula:C19H19Cl2N3O5S.ClH