Photoresist Chemicals 1H-1,4-Benzodiazepine-3-carboxylic acid, 7-chloro-1-[2-(diethylamino)ethyl]-2,3-dihydro-2-oxo-5-phenyl-, 3-(diethylamino)propyl ester, dihydrochloride Cas:61801-48-7 Molecular Formula:C29H39ClN4O3.2ClH