Photoresist Chemicals 1(3H)-Isobenzofuranone,3-[4-hydroxy-2-methyl-5-(1-methylethyl)phenyl]-3-[2-methyl-5-(1-methylethyl)-4-(phosphonooxy)phenyl]-,magnesium salt (1: ) Cas:68991-94-6 Molecular Formula:C28H31 O7 P . x Mg