Photoresist Chemicals 1,3,8-Triazaspiro[4.5]dec-3-en-2-one, 1-(3-fluorophenyl)-7-methyl-8-[[3-(1-methylethoxy)phenyl]methyl]-4-[[1-( methylsulfonyl)-3-pyrrolidinyl]amino]-, (5R,7S)-rel-, 2,2,2-trifluoroacetate (1:1) Cas:921602-46-2 Molecular Formula:C29H38FN5O4S.C2HF3O2