Photoresist Chemicals 1,3-Dioxolane-4,5-dicarboxylic acid, 2-[(3S)-3,6-dihydro-4-[(trimethylsilyl)oxy]-2H-thiopyran-3-yl]-, bis(1-methylethyl) ester, (4R,5R)- Cas:649721-39-1 Molecular Formula:C19H32O7SSi