Photoresist Chemicals 1,3-Dioxa-7-azaspiro[4.4]nonane-6-carboxaldehyde, 6-[(1S)-1-hydroxyethyl]-2,2,7,9-tetramethyl-8-oxo-, (5R,6R,9S)-rel- Cas:928613-61-0 Molecular Formula:C13H21NO5