Photoresist Chemicals 1,3-Dioxa-5,6,8,9-tetraaza-7-phospha-2,4,10-trisilacyclodecane, 2,2,4,4,10,10-hexamethyl-7-phenoxy-, 7-sulfide Cas：95791-97-2 Molecular Formula：C12H27N4O3PSSi3