Photoresist Chemicals 1,2-Pyrrolidinedicarboxylic acid, 2-[[[(1,1-dimethylethyl)diphenylsilyl]oxy]methyl]-5-(2-propenyl)-, 1-(1,1-dimethylethyl) 2-methyl ester, (2R,5S)- Cas:881168-37-2 Molecular Formula:C31H43NO5Si