Photoresist Chemicals 1,2-Pentanediol,3-methyl-5-[(1R,2S,5R)-2-methyl-6,8-dioxabicyclo[3.2.1]oct-5-yl]-,2-methanesulfonate, (2R,3S)- Cas：585526-35-8 Molecular Formula：C14H26O6S