Photoresist Chemicals 1,2-Disilacyclohexa-1,4-diene, 1,2-bis[2,2,2-tris(1,1-dimethylethyl)-1-methyl-1-[tris(1,1-dimethylethyl)sil yl]disilanyl]- Cas:849944-99-6 Molecular Formula:C54H120Si8