Photoresist Chemicals 1,1-Cyclopentanedicarboxylic acid, 3-[(1E)-3-(difluorophenylsilyl)-1-propen-1-yl]-4-hydroxy-, 1,1-dimethyl ester, (3R,4R)-rel- Cas：926292-18-4 Molecular Formula：C18H22F2O5Si