Photoresist Chemicals [1,1′-Biphenyl]-2-carboxylic acid, 4′-[[[[(1R,2S)-2-[[(methylsulfonyl)oxy]methyl]-1-[(3,3,3-trifluoro-1-oxoprop yl)amino]cyclopropyl]carbonyl]amino]methyl]-, methyl ester, rel- Cas:578768-32-8 Molecular Formula:C24H25F3N2O7S