Photoresist Chemicals 10-Oxa-3,5,8-triazatrideca-3,12-dienoic acid, 5-[(1,1-dimethylethoxy)carbonyl]-4-[[(1,1-dimethylethoxy)carbonyl]amino ]-9-oxo-, methyl ester Cas:918956-10-2 Molecular Formula:C20H34N4O8