Photoresist Chemicals 1-Pyrrolidinecarboxylic acid, 2-[3-[(methylsulfonyl)oxy]propyl]-3-[[(phenylmethoxy)carbonyl]amino]-, 1,1-dimethylethyl ester, (2R,3S)- Cas:849112-01-2 Molecular Formula:C21H32N2O7S