Photoresist Chemicals 1-Piperidinecarboxylic acid, 4-[[6-[2-fluoro-4-[2-(3-hydroxy-1-piperidinyl)-2-oxoethyl]phenoxy]-5-meth yl-4-pyrimidinyl]oxy]-, 1-methylethyl ester Cas:832754-67-3 Molecular Formula:C27H35FN4O6