Photoresist Chemicals 1-Piperidinecarboxylic acid, 4-[[5-[2-fluoro-4-(methylsulfonyl)phenyl]-1,2,4-oxadiazol-3-yl]methoxy]-, 1,1-dimethylethyl ester Cas：918964-96-2 Molecular Formula：C20H26FN3O6S