Photoresist Chemicals 1-Piperidinecarboxylic acid, 4-[[3-(4-fluoro-6-methoxy-3-pyridinyl)-2-methylpyrazolo[1,5-a]pyrimidin- 7-yl]oxy]-, 1-methylethyl ester Cas:832719-24-1 Molecular Formula:C22H26FN5O4