Photoresist Chemicals 1-Piperidinecarboxylic acid, 4-[2-[3-[3-fluoro-4-(methylsulfinyl)phenyl]-1,2,4-oxadiazol-5-yl]ethoxy]-, 1,1-dimethylethyl ester Cas:918966-31-1 Molecular Formula:C21H28FN3O5S