Photoresist Chemicals 1-Piperidinecarboxylic acid, (3R,5S)-5-[[4-[[3-chloro-4-(2-pyridinylmethoxy)phenyl]amino]thieno[2,3- d]pyrimidin-6-yl]ethynyl]-3-pyrrolidinyl ester Cas:833479-25-7 Molecular Formula:C30H29ClN6O3S