Photoresist Chemicals 1-Piperazinecarboxylic acid, 4-[[5-[2-[(ethoxycarbonyl)amino]-7-(2-pyrimidinyl)-1H-benzimidazol-5-yl] -2-pyridinyl]methyl]-, 2-methylpropyl ester Cas:797046-81-2 Molecular Formula:C29H34N8O4