Photoresist Chemicals 1-Piperazinecarboxylic acid, 4-[1-methyl-2-[[methyl[(8S)-5,6,7,8-tetrahydro-8-quinolinyl]amino]methyl] -1H-benzimidazol-7-yl]-, 1,1-dimethylethyl ester Cas:878026-02-9 Molecular Formula:C28H38N6O2