Photoresist Chemicals 1-Oxa-3,8-diazaspiro[4.5]decane-8-acetamide, N-(3-cyano-4-methyl-2-thienyl)-3-[(3,4-difluorophenyl)methyl]-2-oxo- Cas：917913-21-4 Molecular Formula：C22H22F2N4O3S