Photoresist Chemicals 1-Oxa-3,8-diazaspiro[4.5]decan-2-one, 8-[2-[bis[3-(trifluoromethyl)phenyl]methoxy]ethyl]-3-(2-methoxybenzoyl)-, ethanedioate (1:1) Cas:613673-90-8 Molecular Formula:C32H30F6N2O5.C2H2O4