Photoresist Chemicals 1-Oxa-3-azaspiro[4.4]nonane-2,4-dione,3-[1-(4-amino-6,7-dimethoxy-2-quinazolinyl)-4-piperidinyl]-,methanesulfonate Cas:90892-47-0 Molecular Formula:C22H27N5O5.xCH4O3S